technologymeasurement principle:

white-light interferometer

scanning device:

Piezo positioning system

system parametersobjectives:

up to 4 objectives

manual exchangeable / automated detection

max. range Z axis:

400 μm

topography reproducibility^*:

< 0.15 nm

digitalization:

up to 0.01 pm

scanning speed:

approx. 11.4 – 218 μm/s - full camera resolution up to 400 μm/s – ROI

0.4 μm step height:

< 1 nm (1-σ reproducibility)

12 μm step height:

< 3 nm (1-σ reproducibility)

100 μm step height:

< 20 nm (1-σ reproducibility)

smooth surfaces:

up to 53° (max. slope)

rough surfaces:

up to 90° (max. slope)

camerapixel:

1920 x 1200

speed full resolution:

169 Hz

speed subsampling:

533 Hz (960 x 600 pixel)

speed ROI:

up to 3.2 kHz

optional 5x objectivefield of view:

3.7 x 2.3 mm2

point spacing:

1.9 μm

optional 10x objectivefield of view:

1.8 x 1.2 mm2

point spacing:

0.96 μm

optional 20x objectivefield of view:

0.91 x 0.58 mm2

point spacing:

0.48 μm

optional 50x objectivefield of view:

0.37 x 0.23 mm2

point spacing:

0.19 μm

optional 100x objectivefield of view:

0.18 x 0.12 mm2

point spacing:

0.1 μm

optional 115x objective^**field of view:

0.16 x 0.1 mm2

point spacing:

0.08 μm

control unit

industrial 19” rack housing

piezo controller LED light controller

motorized XY positioning system controller (optional)

PC, Windows10 pro, Core I5, 16 GB RAM, 500 GB SSD, CUDA® compatible graphic board for the fast 3d calculation with installed softwaredocumentationfactory acceptance protocol

CE declaration manuals

*Sq/√2 – profile difference of 2 scans, EPSI, single scan, without profile averaging, laboratory conditions, 1 million points after 3x3 denoising filter

**Olympus 100x WLI objective – the mentioned magnification is calculated in relation to the 100x Nikon objective